in The Semiconductor Industry Epitaxial Etching of High Purity Hydrogen Chloride Gas

Product Details
Customization: Available
CAS No.: 7647-01-0
Formula: HCl
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  • in The Semiconductor Industry Epitaxial Etching of High Purity Hydrogen Chloride Gas
  • in The Semiconductor Industry Epitaxial Etching of High Purity Hydrogen Chloride Gas
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  • in The Semiconductor Industry Epitaxial Etching of High Purity Hydrogen Chloride Gas
  • in The Semiconductor Industry Epitaxial Etching of High Purity Hydrogen Chloride Gas
  • in The Semiconductor Industry Epitaxial Etching of High Purity Hydrogen Chloride Gas
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  • Overview
  • Product Description
  • Project Examples
  • Product Parameters
  • Packaging & Shipping
Overview

Basic Info.

Model NO.
F-01
EINECS
231-595-7
Constituent
Industrial Pure Air
Grade Standard
Electronic Grade
Chemical Property
Non-Flammable Gas
Un No.
1050
Purity
99.999%
DOT Class
2.3
Appearance
Colorless
Transport Package
Cylinder
Specification
47L
Trademark
DJGAS
Origin
China
HS Code
2830909000
Production Capacity
20000/Year

Product Description

Product Description

In the semiconductor industry, it is used to both etch semiconductor crystals and to purify silicon via trichlorosilane (SiHCl3).

Molecular Formula : HCL
Molecular Weight   : 36.46

Gas Specific Weight   (0ºC, Air=1) : 1.268
Molar Volume   : 22.25L
Color    : Colorless
UN Number: 1050
Gas Viscosity Measurement: 1.56c/o 10-5Pa S
Constant-pressure Specific Heat: Cp=0.812Kj/Kg K
Constant-volume Specific Heat: Cv=0.576Kj/Kg K
Critical Pressure: 8.258MPa
Critical Temperature: 51.4ºC
Critical Density: 0.424g/cm3
Latent heat Of Evaporation: 443.3Kj/Kg
Gas Density(0ºC,0.1MPa): 1.639g/dm3
Atmospheric Boiling Point: -85ºC
 
Project Examples

 

*5 tons of HCl used for metal surface cleaning for one oil refining factory in Kuwait.

*7.5 tons of HCl used as raw material for producing polyvinyl chloride in Poland.

*3 tons of 99.999% HCl exported to Singapore for semiconductor manufacturing
Product Parameters

 

Liquid hydrogen chloride vapor pressure:

Temperature (ºC)

-85.03

-10

0

10

20

30

40

Pressure (Mpa)

0.1

1.96

2.57

3.32

4.21

5.27

6.53

Density (g/cm3)

1.191

0.962

0.924

0.881

0.831

0.772

0.697

Physical & Chemical Properties

Colorless, toxic, irritating, smothering, nonflammable gas: strong hygroscopic, after absorbing the moisture in the air, hydrochloric acid is generated, with strong corrosiveness. Stored in cylinders in the form of liquefied gas, pressure (3-6MPa) is constant, and its value is related to temperature.

Inorganic compounds such as tin chloride, phosphorus trioxide, phosphorus bromide, and so on, and organic compounds such as paraffin, ethanol, ether, acetaldehyde, ketone, acid, ester, nitrite, etc. can be dissolved well in hydrogen chloride, and additional reaction can occur.

Pure liquid hydrogen chloride does not react with most metals. However, it reacts with alkali metals, aluminum, manganese, iron, copper, tin, lead and zinc and produces a protective film of chloride on its surface. When water is present, it reacts with metal to form metal chloride and hydrogen gas.

Use & Storage

The storage room for hydrogen chloride cylinder should be ventilated and dry, avoid direct sunlight, and there should be no underground trenches or secret passages. Open fire is strictly forbidden and away from heat source. Cylinder should be placed vertically, with the cap, properly fixed, prevent dumping.

When using, connect the exhaust nozzle of the cylinder valve with the production device. Gas leakage is strictly prohibited. When used, the ambient temperature is between -20 degrees Celsius and 40 degrees Celsius

Avoid sun exposure and stay at least 10 meters away from an open flame.

The gas in the bottle shall not be used up, and the pressure shall be kept at not less than 0.5mpa.

For the intermittent system, the air of the high-purity nitrogen replacement system should be used first, and then the hydrogen chloride should be used to enter the system and discharge nitrogen, so that the system can carry out normal production. After production, hydrogen chloride in the high purity nitrogen replacement system is used to prevent system corrosion. After use, close the cylinder valve in time, remove the cylinder from the system, wipe each part of the cylinder valve, and tighten the bottle cap.

The use of self - contained cylinders, the valves must be changed by us. If the bottle valve is damaged, please ask our company to replace it. Special cylinder for hydrogen chloride is strictly prohibited to refit other gases.

Cylinder body and valve are strictly prohibited oil pollution.

In the process of use, when the gas cylinder exhaust speed is relatively fast, the cylinder and pipeline crystallization is normal, and it is forbidden to be poured with hot water. In order to avoid frost in cylinder and pipeline, please use special gas supply device when the flow rate of gas consumption is greater than 2m3/h. We can provide special air supply equipment.

When the reliability of the cylinder cannot be determined, it should be tested immediately. The cylinder safety inspection period is two years, and the cylinder beyond the safety inspection period cannot be used. The cylinder should be sent to us for maintenance after one year of use

The user unit shall organize workers and relevant management personnel to study the technical specification of hydrogen chloride safety, and be familiar with the accident hazards that may occur with hydrogen chloride gas and other relevant knowledge and information such as first aid and emergency measures.
 

Packaging & Shipping

 

Packing

Gas Cylinder

Item

Volume

Weight (Kg)

 

Weight

1

44

25

50

2 DOT

47

27

52

The product can be put in the frame, transported by car or by sea.

20 feet container can hold 10 framework, about 160 cylinders; each frame with 16 cylinders or 20 cylinders. Each frame with 16 cylinders or 20 cylinders.

 

Gas Drum

250kg

Y type

550kg

T type

660kg

T type

500kg

Y type

 

Valve

Item

Pipe Orifice

Connector

1

PZ 22.8

CGA330

2

3"/4-14

CGA330

3

3"/4-14

DISS634

4

3"/4-14

DN-8

 

10T Truck

Parameter

Truck body size (length * width * height):12390*2480*3000(mm)

Size of steel tube (diameter * thickness * bottle length):599*16.8*10970(mm)

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