CAS No.: 7783-54-2
EINECS No.: 232-007-1
UN No.: UN2451
Purity: 99.99%-99.999%
Dot Class: 2.2 & 5.1
Appearance: Colorless
Grade Standard: Industrial Grade, Electronic Grade
Specification |
99.99% |
99.999% |
Carbon Tetrafluoride |
≤40ppmv |
≤20ppmv |
Nitrogen |
≤10ppmv |
≤50ppmv |
Oxygen+Argon |
≤5ppmv |
≤3ppmv |
Carbon Monoxide |
≤1ppmv |
≤1ppmv |
Carbon Dioxide |
≤3ppmv |
≤0.5ppmv |
Nitrous Oxide |
≤3ppmv |
≤1ppmv |
Sulfur Hexafluoride |
≤3ppmv |
≤2ppmv |
Moisture |
≤1ppmv |
≤1ppmv |
Express as HF |
≤1ppmv |
≤1ppmv |
1. Plasma etching: In the microelectronics industry, plasma etching has become an important method for preparing microelectronic devices. Nitrogen trifluoride, as an important plasma etching agent, can be used in the etching process of silicon, silicon dioxide, silicon nitride and other materials.
2. High-energy fuel: nitrogen trifluoride can react with other fuels (such as hydrogen) to produce a large amount of energy, so it can be used as a high-energy fuel.
3. Rocket propellant: In rocket propellant, nitrogen trifluoride can be used as an important oxidizer to react with the fuel to produce a large amount of energy to promote rocket flight.
4. Electronic refrigeration: nitrogen trifluoride is also widely used in the field of electronic refrigeration. By using the high vapor pressure and low thermal conductivity of nitrogen trifluoride at room temperature, the heat generated by electronic devices can be quickly discharged and the rapid cooling of electronic devices can be realized.
5. Chemical vapor deposition: In chemical vapor deposition, nitrogen trifluoride can be used as one of the reactants for the preparation of nitride, fluoride and other materials.
6. Nuclear industry: In the nuclear industry, nitrogen trifluoride can be used in the production of nuclear fuel and nuclear fission control rods.
7. Scientific research: nitrogen trifluoride is also widely used in the field of scientific research, such as for the study of plasma physics and chemical reaction dynamics.

1.Are you a factory or a trading company?
We are a manufacturer and trade integration company.
2.What is the min order?
Different products have different min order. It's depends on the kind of the gas and the cylinder specifications. Please feel free to contact with us directly for your requirement.
3.How long is your delivery time?
Within 30 days after payment is done. We can arrange immediately delivery if we have stock.
4.How to ensure transportation safety?
Don't worry. We have rich gases export and delivery experiences. We will rely on professional gas packaging and transportation to ensure safety.
5.What is the package&storage details?
Seamless steel cylinder with different valves, or as to your requirements.Stored in shady,cool,dry,ventilated warehouse,and keep away from sunlight and ramming.
6.If the cylinder recycled and can be refill gas again?
Yes. Usually the seamless cylinder can recycle to use for 30 years, and also can be refill gas again. But before exporting , you have to inform us, we will handle all the import customs clearance formalities.